5/26/2011	12:19:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/26/2011	12:19:29 AM	Recipe started at 12:19 AM
5/26/2011	12:19:29 AM	Helium valve closed
5/26/2011	12:19:29 AM	H2 valve closed
5/26/2011	12:19:29 AM	BCl3 valve closed
5/26/2011	12:19:29 AM	PH3 valve closed
5/26/2011	12:19:29 AM	SiCl4 pre valve closed
5/26/2011	12:19:29 AM	SiCl4 post valve closed
5/26/2011	12:19:29 AM	Main Vac valve closed
5/26/2011	12:19:29 AM	Bubbler valve closed
5/26/2011	12:19:29 AM	Bypass valve opened
5/26/2011	12:19:29 AM	Helium MFC set to  0.000000
5/26/2011	12:19:29 AM	H2 MFC set to  0.000000
5/26/2011	12:19:29 AM	BCl3 MFC set to  0.000000
5/26/2011	12:19:29 AM	PHl3 MFC set to  0.000000
5/26/2011	12:19:29 AM	SiCl4 MFC set to  0.000000
5/26/2011	12:19:29 AM	Bypass solenoid MFC set to  0.000000
5/26/2011	12:19:29 AM	Tube furnace set to 0
5/26/2011	12:19:53 AM	Helium valve closed
5/26/2011	12:19:53 AM	H2 valve closed
5/26/2011	12:19:53 AM	BCl3 valve closed
5/26/2011	12:19:53 AM	PH3 valve closed
5/26/2011	12:19:53 AM	SiCl4 pre valve closed
5/26/2011	12:19:53 AM	SiCl4 post valve closed
5/26/2011	12:19:53 AM	Bubbler valve closed
5/26/2011	12:19:53 AM	Main Vac valve opened
5/26/2011	12:19:53 AM	Bypass valve opened
5/26/2011	12:19:53 AM	Helium MFC set to  0.000000
5/26/2011	12:19:53 AM	H2 MFC set to  0.000000
5/26/2011	12:19:53 AM	BCl3 MFC set to  0.000000
5/26/2011	12:19:53 AM	PHl3 MFC set to  0.000000
5/26/2011	12:19:53 AM	SiCl4 MFC set to  0.000000
5/26/2011	12:19:53 AM	Bypass solenoid MFC set to  0.000000
5/26/2011	12:19:53 AM	Tube furnace set to 0
5/26/2011	12:19:53 AM	Run finished at 12:19 AM
5/26/2011	12:19:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/26/2011	10:17:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/26/2011	10:17:08 AM	Recipe started at 10:17 AM
5/26/2011	10:17:08 AM	H2 valve closed
5/26/2011	10:17:08 AM	BCl3 valve closed
5/26/2011	10:17:08 AM	PH3 valve closed
5/26/2011	10:17:08 AM	SiCl4 pre valve closed
5/26/2011	10:17:08 AM	SiCl4 post valve closed
5/26/2011	10:17:08 AM	Main Vac valve closed
5/26/2011	10:17:08 AM	Bypass valve closed
5/26/2011	10:17:08 AM	Bubbler valve closed
5/26/2011	10:17:08 AM	Helium valve opened
5/26/2011	10:17:08 AM	Helium MFC set to  500.000000
5/26/2011	10:17:08 AM	H2 MFC set to  0.000000
5/26/2011	10:17:08 AM	BCl3 MFC set to  0.000000
5/26/2011	10:17:08 AM	PHl3 MFC set to  0.000000
5/26/2011	10:17:08 AM	SiCl4 MFC set to  0.000000
5/26/2011	10:17:08 AM	Bypass solenoid MFC set to  0.000000
5/26/2011	10:17:08 AM	Tube furnace set to 0
5/26/2011	10:18:28 AM	Helium valve closed
5/26/2011	10:18:28 AM	H2 valve closed
5/26/2011	10:18:28 AM	BCl3 valve closed
5/26/2011	10:18:28 AM	PH3 valve closed
5/26/2011	10:18:28 AM	SiCl4 pre valve closed
5/26/2011	10:18:28 AM	SiCl4 post valve closed
5/26/2011	10:18:28 AM	Main Vac valve closed
5/26/2011	10:18:28 AM	Bypass valve closed
5/26/2011	10:18:28 AM	Bubbler valve closed
5/26/2011	10:18:28 AM	Helium MFC set to  0.000000
5/26/2011	10:18:28 AM	H2 MFC set to  0.000000
5/26/2011	10:18:28 AM	BCl3 MFC set to  0.000000
5/26/2011	10:18:28 AM	PHl3 MFC set to  0.000000
5/26/2011	10:18:28 AM	SiCl4 MFC set to  0.000000
5/26/2011	10:18:28 AM	Bypass solenoid MFC set to  0.000000
5/26/2011	10:18:28 AM	Tube furnace set to 0
5/26/2011	10:18:28 AM	Run finished at 10:18 AM
5/26/2011	10:18:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/26/2011	10:20:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/26/2011	10:20:39 AM	Recipe started at 10:20 AM
5/26/2011	10:20:39 AM	Helium valve closed
5/26/2011	10:20:39 AM	H2 valve closed
5/26/2011	10:20:39 AM	BCl3 valve closed
5/26/2011	10:20:39 AM	PH3 valve closed
5/26/2011	10:20:39 AM	SiCl4 pre valve closed
5/26/2011	10:20:39 AM	SiCl4 post valve closed
5/26/2011	10:20:39 AM	Main Vac valve closed
5/26/2011	10:20:39 AM	Bubbler valve closed
5/26/2011	10:20:39 AM	Bypass valve opened
5/26/2011	10:20:39 AM	Helium MFC set to  0.000000
5/26/2011	10:20:39 AM	H2 MFC set to  0.000000
5/26/2011	10:20:39 AM	BCl3 MFC set to  0.000000
5/26/2011	10:20:39 AM	PHl3 MFC set to  0.000000
5/26/2011	10:20:39 AM	SiCl4 MFC set to  0.000000
5/26/2011	10:20:39 AM	Bypass solenoid MFC set to  0.000000
5/26/2011	10:20:39 AM	Tube furnace set to 0
5/26/2011	10:21:11 AM	Helium valve closed
5/26/2011	10:21:11 AM	H2 valve closed
5/26/2011	10:21:11 AM	BCl3 valve closed
5/26/2011	10:21:11 AM	PH3 valve closed
5/26/2011	10:21:11 AM	SiCl4 pre valve closed
5/26/2011	10:21:11 AM	SiCl4 post valve closed
5/26/2011	10:21:11 AM	Bubbler valve closed
5/26/2011	10:21:11 AM	Main Vac valve opened
5/26/2011	10:21:11 AM	Bypass valve opened
5/26/2011	10:21:11 AM	Helium MFC set to  0.000000
5/26/2011	10:21:11 AM	H2 MFC set to  0.000000
5/26/2011	10:21:11 AM	BCl3 MFC set to  0.000000
5/26/2011	10:21:11 AM	PHl3 MFC set to  0.000000
5/26/2011	10:21:11 AM	SiCl4 MFC set to  0.000000
5/26/2011	10:21:11 AM	Bypass solenoid MFC set to  0.000000
5/26/2011	10:21:11 AM	Tube furnace set to 0
5/26/2011	10:21:12 AM	Run finished at 10:21 AM
5/26/2011	10:21:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/26/2011	10:22:32 AM	Helium valve opened
5/26/2011	10:22:35 AM	Helium MFC set to  100.000000
5/26/2011	10:23:07 AM	Helium valve closed
5/26/2011	10:23:10 AM	Helium MFC set to  0.000000
5/26/2011	10:23:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/26/2011	10:23:29 AM	Recipe started at 10:23 AM
5/26/2011	10:23:29 AM	Helium valve closed
5/26/2011	10:23:29 AM	H2 valve closed
5/26/2011	10:23:29 AM	BCl3 valve closed
5/26/2011	10:23:29 AM	PH3 valve closed
5/26/2011	10:23:29 AM	SiCl4 pre valve closed
5/26/2011	10:23:29 AM	SiCl4 post valve closed
5/26/2011	10:23:29 AM	Main Vac valve closed
5/26/2011	10:23:29 AM	Bypass valve closed
5/26/2011	10:23:29 AM	Bubbler valve closed
5/26/2011	10:23:29 AM	Helium MFC set to  0.000000
5/26/2011	10:23:29 AM	H2 MFC set to  0.000000
5/26/2011	10:23:29 AM	BCl3 MFC set to  0.000000
5/26/2011	10:23:29 AM	PHl3 MFC set to  0.000000
5/26/2011	10:23:29 AM	SiCl4 MFC set to  0.000000
5/26/2011	10:23:29 AM	Bypass solenoid MFC set to  0.000000
5/26/2011	10:23:29 AM	Tube furnace set to 0
5/26/2011	10:23:29 AM	Run finished at 10:23 AM
5/26/2011	10:23:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
